Monitoring organics on wafer surfaces using thermal desorption GC-MSD/AED

MICRO

Volumn 18, Issue 3, 2000, Pages 59-71

  Sun, Peng ^a,b,c,d   Adams, Martin ^e,f   Bridges, Terrie ^g  

^a INTEL CORPORATION   (United States)

^b MEMC Electronic Materials   (United States)

^c AMERICAN HEALTH FOUNDATION   (United States)

^d BINGHAMTON UNIVERSITY   (United States)

^e Chromatography Division   (United States)

^f MISSOURI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (United States)

^g SOUTHEAST MISSOURI STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012789989     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

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