Mechanical stress measurements using micro-Raman spectroscopy

Microsystem Technologies

Volumn 5, Issue 1, 1998, Pages 13-17

  De Wolf, I ^a   Maes, H E ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012723120     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050134     Document Type: Article

References (11)

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11. Ostermeir R; Brunner K; Abstreiter G; Weber W (1992) IEEE Electron Devices 39(4), 858