Nanocrystals in crystalline silicon: Void formation and hollow particles

Journal of Materials Research

Volumn 16, Issue 9, 2001, Pages 2670-2679

  Meldrum, A ^a   Honda, S ^b   White, C W ^b   Zuhr, R A ^b   Boatner, L A ^b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012656585     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2001.0366     Document Type: Article

References (31)

1. A. Meldrum, R.F. Haglund Jr., L.A. Boatner, and C.W. White. Adv. Mater. (in press).
2. Proceedings of the XXth International conference on Ion Beam Modification of Materials, edited by A. Polman, Nucl. Instrum. Methods Phys. Rev. B 148 (Elsevier, Amsterdam, The Netherlands, 1999).
3. A. Meldrum, L.A. Boatner, C.W. White, and R.C. Ewing, Mater. Res. Innovations 3, 204 (2000).
4. L. Brus, in World Technology Evaluation Center Workshop Report on R&D Status and Trends in Nanoparticles, Nanostructured Materials, and Nanodevices in the United States, Proceedings of the May 8-9, 1997, Workshop.
5. R. Siegel, Phys. Today Oct., 64 (1993).
6. A.P. Alivisatos, Science 271, 933 (1996).
7. A. Meldrum, C.W. White, L.A. Boatner, I.M. Anderson, R.A. Zuhr, E. Sonder, and J.D. Budai, and D.O. Henderson, Nucl. Instrum. Methods Phys. Res. B149, 957 (1999).
8. J.D. Budai, C.W. White, S.P. Withrow, M.F. Chisholm, J.G. Zhu, and R.A. Zuhr, Nature 390, 384 (1997).
9. A. Meldrum, R.A. Zuhr, E. Sonder, J.D. Budai, C.W. White, L.A. Boatner, D.O. Henderson, and R.C. Ewing, Appl. Phys. Lett. 74, 699 (1999).
10. A. Meldrum, E. Sonder, R.A. Zuhr, I.M. Anderson, J.D. Budai, C.W. White, L.A. Boatner, and D.O. Henderson, J. Mater. Res. 14, 4502 (1999).
11. J.P. McCaffrey, B.T. Sullivan, J.W. Fraser, and D.L. Callahan, Micron 27, 407 (1996).
12. B. Wunderlich, J. Cryst. Growth 48, 227 (1980).
13. N.D. Theodore, T.L. Alford, C.B. Carter, J.W. Mayer, and N.W. Cheung, Appl. Phys. A 54, 124 (1992).
14. A.N. Nesmeyanov, Vapor Pressure of the Chemical Elements (Elsevier, Amsterdam, The Netherlands, 1963).
15. J. Wong-Leung, J.S. Williams, R.G. Elliman, E. Nygren, D.J. Eaglesham, D.C. Jacobson, and J.M. Poate, Nucl. Instrum. Methods Phys. Res. B96, 253 (1995).
16. D.M. Follstaedt, S.M. Myers, G.A. Petersen, and J.W. Medernach, J. Electron. Mater. 25, 151 (1996).
17. V. Raineri, P.G. Fallica, G. Percolla, A. Battaglia, M. Barbagallo, and S.U. Campisano, J. Appl. Phys. 78, 3727 (1995).
18. E. Antoncik, Appl. Phys. A 56, 291 (1993).
19. A. Herrera Gomez, P.M. Rousseau, G. Materlik, T. Kendelewicz, J.C. Woicik, P.B. Griffin, J. Plummer, and W.E. Spicer, Appl. Phys. Lett. 68, 3090 (1996).
20. J. Wong-Leung, E. Nygren, and J.S. Williams, Appl. Phys. Lett. 67, 416 (1995).
21. L.Z. Mezey and J. Giber, Jpn. J. Appl. Phys. 21, 1569 (1982).
22. H.W. Sheng, K. Lu, and E. Ma. Acta Mater. 46, 5195 (1998).
23. H.W. Sheng, J. Xu, L.G. Yu, X.K. Sun, Z.Q. Hu, and K. Lu, J. Mater. Res. 11, 2841 (1996).
24. H.W. Sheng, G. Ren, M. Peng, Z.Q. Hu, and K. Lu, Philos. Mag. Lett. 73, 179 (1996).
25. S.J. Zinkle and E.H. Lee, Met. Trans. 21A, 1037 (1990).
26. N. Ishikawa, M. Awaji, K. Furuya, R.C. Birtcher, and C.W. Allen, Nucl. Instrum. Methods B 127/128, 123 (1997).
27. D.M. Follstaedt, Appl. Phys. Lett. 62, 1116 (1993).
28. S.M. Myers and D.M. Follstaedt, J. Appl. Phys. 79, 1337 (1996).
29. J. Wong-Leung, C.E. Ascheron, M. Petravic, R.G. Elliman, and J.S. Williams, Appl. Phys. Lett. 66, 1231 (1995).
30. A. Meldrum, S.J. Zinkle, L.A. Boatner, and R.C. Ewing, Nature 395, 56 (1998).
31. W.R. Wampler, S.M. Myers, and D.M. Follstaedt, Phys. Rev. B 48, 4492 (1993).