Use of transmitted color to calibrate the thickness of silicon samples

Micron

Volumn 27, Issue 6, 1996, Pages 407-411

  McCaffrey, J P ^a   Sullivan, B T ^a   Fraser, J W ^a   Callahan, D L ^b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b Rice University   (United States)

Author keywords

Color; Optical transmission; Silicon; TEM; TEM sample preparation

Indexed keywords

EID: 0030419171     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(96)00049-2     Document Type: Article

References (5)

1. Bouma, P. J., 1971. Physical Aspects of Color. Macmillan, The Netherlands, pp. 71-95.
2. Ellington, M. B., 1988. A controlled method of preparing plan-view silicon samples for transmission electron microscope studies. In: Mat. Res. Soc. Symp. Proc. Vol. 115. Bravman, J. C., Anderson, R. M. and McDonald, M. L. (eds). Materials Research Society. Pittsburgh, PA, pp. 265-270.
3. Palik, E. D. (ed.), 1985. Handbook of Optical Constants of Solids. Academic Press, FL.
4. Macleod, H. A., 1986. Thin Film Optical Filters, 2nd edn. Macmillan, NY.
5. McCaffrey, J. P., 1993. Improved TEM samples of semiconductors prepared by a small angle cleavage technique. Microscopy Research and Technique, 24, 180-184