Mechanical strain and damage in Si implanted with O and N ions at elevated temperatures: Evidence of ion beam induced annealing

Journal of Applied Physics

Volumn 89, Issue 1, 2001, Pages 42-46

  De Souza, J P ^a   Suprun Belevich, Yu ^a   Boudinov, H ^a   Cima, C A ^a  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012594667     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1330254     Document Type: Article

References (13)

1. F. F. Morehead, B. L. Crowder, and R. S. Title, J. Appl. Phys. 43, 1112 (1972).
2. O. W. Holland, J. D. Budai, and B. Nielsen, Mater. Sci. Eng., A 253, 240 (1998).
3. O. W. Holland, D. S. Zhou, and D. K. Thomas, Appl. Phys. Lett. 63, 896 (1993).
4. O. W. Holland and C. W. White, Nucl. Instrum. Methods Phys. Res. B 59/60, 353 (1991).
5. D. Venables and K. S. Jones, Nucl. Instrum. Methods Phys. Res. B 74, 65 (1993).
6. D. Venables, K. S. Jones, F. Namavar, and J. M. Manke, Mater. Res. Soc. Symp. Proc. 235, 103 (1992).
7. S. L. Ellingboe and M. C. Ridgway, Nucl. Instrum. Methods Phys. Res. B 127/128, 90 (1997).
8. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Ranges of Ions in Solids (Pergamon, New York, 1985).
9. F. Eisen, in Channeling, edited by D. V. Morgan (Wiley, New York, 1973), p. 417.
10. C. D. Meekison, G. R. Booker, K. J. Reeson, P. L. F. Hemment, R. F. Peart, B. J. Chafer, J. A. Kilner, and J. R. Davis, J. Appl. Phys. 69, 3503 (1991).
11. J. P. de Souza, Yu. Suprun-Belevich, H. Boudinov, and C. A. Cima, J. Appl. Phys. 87, 8385 (2000).
12. E. F. Kennedy, L. Csepregi, J. W. Mayer, and T. W. Sigmon, J. Appl. Phys. 48, 4241 (1977).
13. H. Boudinov and J. P. de Souza, Nucl. Instrum. Methods Phys. Res. B 122, 293 (1997).