In situ reflectance difference spectroscopy and reflection high-energy electron diffraction observation of nitridation processes on GaAs(001) surfaces

Journal of Applied Physics

Volumn 82, Issue 9, 1997, Pages 4684-4686

  Jung, H D ^a   Kumagai, N ^a   Hanada, T ^a   Zhu, Z ^a   Yao, T ^a,c   Yasuda, T ^b,c   Kimura, K ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b JT RES CENTER FOR ATOM TECHNOLOGY   (Japan)

^c NATL INST FOR ADV INTERDISC RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012594412     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366209     Document Type: Article

References (15)

1. S, Nakamura, T. Mukai, M. Senoh, S. Nagahama, and N. Iwasa, J. Appl. Phys. 74, 3911 (1993).
2. C. Wang and R. F. Davis, Appl. Phys. Lett. 63, 990 (1993).
3. O. Brandt, H. Yang, B. Jenichen, Y. Suzuki, L. Dweritz, and K. H. Ploog, Phys. Rev. B 52, R2253 (1992).
4. S. Strite, J. Ruan, Z. Li, A. Salvador, H. Chen, David J. Smith, W. J. Choyke, and H. Morkoc, J. Vac. Sci, Technol. B 9, 1924 (1991).
5. T. S. Cheng, L. C. Jenkins, S. E. Hooper, C. T. Foxon, J. W. Orton, and D. E. Lacklison, Appl. Phys. Lett. 66, 1509 (1995).
6. Y. Yamauchi, K. Uwai, and N. Kobayashi, Jpn. J. Appl. Phys., Part 1 35, L80 (1996).
7. R. J. Hauenstein, D. A. Collins, X. P. Cai, M. L. O'Steen, and T. C. McGill. Appl. Phys. Lett. 66, 2861 (1995).
8. A. Kikuchi, H. Hoshi, and K. Kishino, Jpn. J. Appl. Phys., Part 1 33, 688 (1994).
9. Z. Zhu, K. Takebayashi, K. Tanaka, T. Ebisutani, J. Kawamata. and T. Yao, Appl. Phys. Lett. 64, 91 (1994).
10. D. E. Aspnes, J. P. Harbison, A. A. Studna, and L. T. Florez, J. Vac. Sci. Technol. A 6, 1327 (1988).
11. I. Kamiya, D. E. Aspnes, H. Tanaka, L. T. Florez, J. P. Harbison, and R. Bhat, Phys. Rev. Lett. 68, 627 (1992).
12. H. Morkoc, S. Strite, G. B. Gao, M. E. Lin, B. Sverdlov, and M. Burns, J. Appl. Phys. 76, 1363 (1994).
13. Y. Yamaguchi, K. Uwai, and N. Kobayashi, Jpn. J. Appl. Phys., Part 1 35, L80 (1996).
14. T. Makimoto, M. Kasu, J. L. Benchimol, and N. Kobayashi, Jpn. J. Appl. Phys., Part 1 36, 1733 (1997).
15. Z. Z. Bandic, R. J. Hauenstein, M. L. O'Steen, and T. C. McGill, Appl. Phys. Lett. 68, 1510 (1996).