Carbon overcoat composition and structure analysis by secondary ion mass spectrometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1750-1756

  Erickson, J W ^a   Sheng, J ^a   Gao, Y ^a   Pham, H ^b   Singer, I L ^c  

^a CHARLES EVANS AND ASSOCIATES   (United States)

^b Stormedia Inc   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON OVERCOAT; DIAMOND-LIKE CARBON; HARD DISC; HYDROGENATED CARBON; LINEARLY PROPORTIONAL; MAGNETIC LAYERS; OUT-DIFFUSION; RELATIVE VALUE; SECONDARY IONS; STRUCTURAL INFORMATION; STRUCTURE ANALYSIS; SUB-LAYERS; TRIBOLOGICAL ISSUES;

CHROMIUM; IONS; MASS SPECTROMETERS; NITRIDES; SECONDARY EMISSION; SPECTROMETRY; STOICHIOMETRY;

SECONDARY ION MASS SPECTROMETRY;

EID: 0012501058     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581296     Document Type: Article

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