Effects of Pt/RuO2 hybrid bottom electrodes on the electrical properties of BST thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4086, Issue , 2000, Pages 633-636

  Zhang, Tianjin ^a   Ni, Hong ^a  

^a HUBEI UNIVERSITY   (China)

Author keywords

BST thin films; Dielectric constant and dissipation factor; Hybrid bottom electrode; Leakage current; Pt Ru02

Indexed keywords

ELECTRODES; RUTHENIUM COMPOUNDS;

BOTTOM ELECTRODES; BST FILM; BST THIN FILMS; DISSIPATION FACTORS; HYBRID ELECTRODES; ZERO-BIAS VOLTAGE;

THIN FILMS;

EID: 0012246751     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.408340     Document Type: Conference Paper

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