Range profiles and lattice location of MeV implant of Sb in Si (1 0 0)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 142, Issue 1-2, 1998, Pages 35-42

  Dey, S ^a   Kuri, G ^a   Rout, B ^a   Varma, S ^a  

^a INSTITUTE OF PHYSICS   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ANTIMONY; COMPUTER SIMULATION; CRYSTAL DEFECTS; CRYSTAL LATTICES; HELIUM; ION IMPLANTATION; IONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON; SINGLE CRYSTALS; SPECTRUM ANALYSIS;

COMPUTER SIMULATED SPECTRUM ANALYSIS; LATTICE LOCATION; RANGE PARAMETER;

ATOMS;

EID: 0032089595     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00207-9     Document Type: Article

References (35)

1. O.W. Holland, D. Fathy, J. Appl. Phys. 63 (1988) 5326.
2. J.S. Williams et al., Nucl. Instr. and Meth. B 80/81 (1993) 507; M.V. Rao, Nucl. Instr. and Meth. B 79 (1993) 645.
3. J.S. Williams et al., Nucl. Instr. and Meth. B 80/81 (1993) 507; M.V. Rao, Nucl. Instr. and Meth. B 79 (1993) 645.
4. G. Kuri, B. Sundaravel, B. Rout, D.P. Mahapatra, B.N. Dev, Nucl. Instr. and Meth. B 111 (1996) 234; and references therein.
5. W.K. Chu, J.W. Mayer, M.A. Nicolet, Backscattering Spectrometry, Academic Press, New York, 1978.
6. A.P. Pogany, T. Preuss, K.T. Short, H.K. Wagenfeld, J.S. Williams, Nucl. Instr. and Meth. 209/210 (1983) 731.
7. A.M. Mazzone, Phys. Stat. Sol. A 95 (1986) 149.
8. J.S. Williams, K.T. Short, J. Appl. Phys. 53 (1982) 8663.
9. K.S. Jones, S. Prussin, E.R. Weber, Appl. Phys. A 45 (1988) 1.
10. J.P. Biersack, L.G. Haggmark, Nucl. Instr. and Meth. 174 (1980) 257. We have used the version TRIM-91.04.
11. See for example: D. Fink, L. Wang, Radiat. Eff. Def. Solids 114 (1990) 343.
12. K. Sekar, P.V. Satyam, G. Kuri, D.P. Mahapatra, B.N. Dev, Nucl. Instr. and Meth. B 73 (1993) 63.
13. J. Saarilahti, E. Rauhala, Nucl. Instr. and Meth. B 64 (1992) 734.
14. G. Kuri, Nucl. Instr. and Meth. B 117 (1996) 213.
15. T.P. Sjoreen, O.W. Holland, M.K. ElGhor, C.W. White, Mat. Res. Soc. Symp. Proc. 128 (1989) 593.
16. A. Battaglia, F. Priolo, E. Rimini, Appl. Surf. Sci. 56 (1992) 577.
17. J. Narayan, O.W. Holland, B.R. Appleton, J. Vac. Sci. Technol. B 1 (1983) 871.
18. V.D. Tkachev, G. Holzer, A.R. Chelyadinski, Phys. Stat. Sol. A 85 (1984) K43.
19. G. Kuri, B. Rout, B. Sundaravel, D.P. Mahapatra, B.N. Dev, Nucl. Instr. and Meth. B 119 (1996) 403.
20. J. Nakata, Phys. Rev. B 43 (1991) 14643.
21. J.R. Dennis, E.B. Hale, J. Appl. Phys. 49 (1978) 1119; J. Narayan, D. Fathy, O.S. Oen, O.W. Holland, J. Vac. Sci. Technol. A 2 (1984) 1303.
22. J.R. Dennis, E.B. Hale, J. Appl. Phys. 49 (1978) 1119; J. Narayan, D. Fathy, O.S. Oen, O.W. Holland, J. Vac. Sci. Technol. A 2 (1984) 1303.
23. S. Furukawa, Jpn. J. Appl. Phys. 11 (1972) 102.
24. P. Sigmund, Appl. Phys. Lett. 14 (1969) 114.
25. G.F. Cerofolini, L. Meda, C. Volpones, J. Appl. Phys. 63 (1988) 4911.
26. J.A. Brinkman, J. Appl. Phys. 25 (1954) 961.
27. J.W. Mayer, L. Eriksson, S.T. Picraux, J.A. Davies, Can. J. Phys. 46 (1968) 663.
28. T. Bachmann, S. Schippel, E. Wendler, W. Wesch, U. Richter, W. Witthuhn, Nucl. Instr. and Meth B 89 (1994) 168.
29. A. Parisini, A. Bourret, A. Armigliato, M. Servidori, S. Solmi, R. Fabbri, J.R. Regnard, J.L. Allin, J. Appl. Phys. 67 (1990) 2320.
30. L.C. Feldman, J.W. Mayer, S.T. Picraux, Materials Analysis by Ion Channeling, Academic Press, New York, 1982.
31. L. Pauling, General Chemistry, Freeman, San Francisco, 1970, p. 195.
32. F.A. Ponce, S. Haln, Mat. Sci. Eng. B 4 (1989) 11.
33. A. Nylandsted Larsen, F.T. Pedersen, G. Weyer, R. Galloni, R. Rizzoli, A. Armigliato, J. Appl. Phys. 59 (1986) 1908.
34. W.X. Lu, Y.H. Qian, R.H. Tian, Z.L. Wang, R.J. Schreutelkamp, J.R. Liefting, F.W. Saris, Appl. Phys. Lett. 55 (1989) 1838.
35. R.J. Schreutelkamp, J.S. Custer, J.R. Liefting, F.W. Saris, W.X. Lu, B.X. Zhang, Z.L. Wang, Nucl. Instr. and Meth. B 62 (1992) 372.