Atomic force microscope lithography with octadecyldimethyl-methoxysilane monolayer resist

Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals

Volumn 337, Issue , 1999, Pages 7-12

  Oh, Young ^a   Kim, Jinchul ^a   Lee, Haiwon ^a  

^a Hanyang University   (South Korea)

Author keywords

Atomic force microscope; Nanolithography; Organosilane; Scanning probe anodization; Self assembled monolayer

Indexed keywords

EID: 0011969617     PISSN: 1058725X     EISSN: None     Source Type: Journal    
DOI: 10.1080/10587259908023367     Document Type: Article

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