Submicron contacts for electrical characterization of semiconducting WS2 thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1239-1243

  Ballif, C ^a   Regula, M ^a   Levy F ^a   Burmeister, F ^b   Schafle C ^b   Matthes, Th ^b   Leiderer, P ^b   Niedermann, Ph ^c   Gutmannsbauer, W ^d   Bucher, R ^d  

^a EPFL   (Switzerland)

^b UNIVERSITY OF KONSTANZ   (Germany)

^c CSEM   (Switzerland)

^d Paul Bucher Company   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011378622     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581266     Document Type: Article

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