Measurement and description of microstructures with consideration of material-specific characteristics;Messung und beschreibung von mikrostrukturen unter berücksichtigung materialspezifischer eigenschaften

Technisches Messen

Volumn 66, Issue 11, 1999, Pages 429-436

  Tiziani, Hans J ^a   Windecker, R ^a   Wegner, M ^a   Leonhardt, K ^a   Steudle, D ^a   Fleischer, M ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRIC MEASUREMENTS; ENGINEERING SURFACES; HIGH RESOLUTION; HIGH-RESOLUTION MEASUREMENTS; NON-CONTACT MODE; OPTICAL MEASUREMENT TECHNIQUES; TACTILE SENSORS; WHITE-LIGHT INTERFEROMETRY;

OPTICAL DATA PROCESSING; SENSORS; SURFACE MEASUREMENT;

INTERFEROMETRY;

EID: 0011260132     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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