101-Frame algorithm for phase shifting interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3098, Issue , 1997, Pages 283-292

  De Groot, Peter J ^a  

^a Zygo   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CCD IMAGES; ERROR SOURCES; FRINGE PATTERN; HIGH-RESOLUTION MEASUREMENTS; IMAGE FRAMES; INTERFERENCE FRINGE; LINEAR FUNCTIONS; MATHEMATICAL ALGORITHMS; PHASE INFORMATION; PHASE-SHIFTING ALGORITHM; PHASE-SHIFTING INTERFEROMETRY; STATE OF THE ART; SURFACE FIGURE; SURFACE PROFILES; WAVE-FRONT PHASE;

FUNCTIONS; INTERFEROMETRY; OPTICAL TESTING; PHASE SHIFT;

ALGORITHMS;

EID: 0010753518     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.281171     Document Type: Conference Paper

References (15)

1. P. Hariharan, Optical Interferometry (Academic Press, Orlando, Florida, 1985), Chap.9, pp.155-159.
2. K. Freischlad and C. L. Koliopoulos, "Fourier description of digital phase-measuring interferometry," J. Opt. Soc. Am. A 7(4), 542-551 (1990).
3. K. Hibino, B. F. Oreb, D. I. Farrant and K. G. Larkin, "Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts," J. Opt. Soc. Am. 14(4), 918-930 (1997).
4. Y. Surrel, "Design of algorithms for phase measurements by the use of phase stepping," Appl. Opt. 35, 51-60 (1996).
5. J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk and K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources," Appl. Opt. 22(21), 3421-3432 (1983).
6. P. Hariharan, B.F. Oreb, and T. Eiju, "Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm," Appl. Opt. 26(13), 2504-2506 (1987).
7. J. H. Bruning, D. R. Herriott, J. E. Galllagher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, "Digital wavefront measuring interferometer for testing optical surfaces and lenses," Appl. Opt. 13(11), 2693-2703 (1974).
8. P. de Groot, "Derivation of phase shift algorithms for interferometry using the concept of a data sampling window," Appl. Opt. 34(22) 4723-4730 (1995).
9. J. Schmit and K. Creath, "Window function influence on phase error in phase-shifting algorithms," Appl. Opt. 35(28), 5642-5649 (1996).
10. P. de Groot, "Phase-shift calibration errors in interferometers with spherical Fizeau cavities," Appl. Opt. 34(16) 2856-2862 (1995).
11. P. de Groot, "Vibration in phase shifting interferometry," J. Opt. Soc. Am. A 12(2), 354-365 (1995).
12. These vibration equations are for phase stepping algorithms, which do not involve the "integrating bucket" technique. The more general case is treated in detail in the cited references.
13. P. de Groot and L. Deck, "Numerical simulations of vibration in phase shifting interferometry," Appl. Opt. 35(13), 2172-2178 (1996).
14. P. de Groot and Leslie Deck, "Surface profiling by analysis of white-light interferograms in the spatial frequency domain," J. Mod. Opt. 42(2), 389-401 (1995).
15. Product literature, Zygo NewView 200 Surface Structure Analyzer. US Patent Nos. 5,398,113 and 5,402,234.