High resolution SEM study of porous silicon

Institute of Physics Conference Series

Volumn , Issue 117, 1991, Pages 235-238

  Gonchond, J P ^a   Halimaoui, A ^a   Ogura, K ^a  

^a Telecommunications ^*  (France)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPIC EXAMINATION - SCANNING ELECTRON MICROSCOPY; CRYSTAL STRUCTURE; POROSITY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; TRANSMISSION ELECTRON MICROSCOPY;

HIGH RESOLUTION SCANNING ELECTRON MICROSCOPY; POROUS SILICON LAYERS; HIGH RESOLUTION SCANNING ELECTRON MICROSCOPY (HRSEM); POROUS SILICON;

SEMICONDUCTING SILICON;

EID: 0026360399     PISSN: 03730751     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)