Metalorganic chemical vapor deposition of tungsten nitride for advanced metallization

Applied Physics Letters

Volumn , Issue , 1995, Pages 1412-

  Tsai, M H ^a   Sun, S C ^a   Chiu, H T ^a   Chuang, S H ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

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EID: 36448999195     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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