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Volumn 68, Issue 9, 1996, Pages 1241-1243

Diffusion mediated chemical reaction in Co/Ge/Si(100) forming Ge/CoSi2/Si(100)

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0009222901     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115939     Document Type: Article
Times cited : (17)

References (16)
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    • H. von Kanel, Mater. Sci. Rep. 8, 193 (1992).
    • H. von Kanel, Mater. Sci. Rep. 8, 193 (1992).
  • 2
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    • L.-S. Hung, Mater. Sci. Rep. 7, 221 (1991).
    • L.-S. Hung, Mater. Sci. Rep. 7, 221 (1991).
  • 7
    • 1842313954 scopus 로고    scopus 로고
    • J. F. van der Veen, Surf. Sci. Rep. 5, 199 (1985).
    • J. F. van der Veen, Surf. Sci. Rep. 5, 199 (1985).
  • 8
    • 21544433463 scopus 로고    scopus 로고
    • G. E. Murch and A. S. Nowick, Diffusion in Crystalline Solids (Academic, New York, 1984).
    • G. E. Murch and A. S. Nowick, Diffusion in Crystalline Solids (Academic, New York, 1984).
  • 9
    • 21544455750 scopus 로고    scopus 로고
    • W. Frank, in Crucial Issues in Semiconductor Materials and Processing Technologies, edited by S. Coffa, F. Priolo, E. Rimini, and J. M. Poate (Kluwer Academic, The Netherlands, 1992), pp. 383-402.
    • W. Frank, in Crucial Issues in Semiconductor Materials and Processing Technologies, edited by S. Coffa, F. Priolo, E. Rimini, and J. M. Poate (Kluwer Academic, The Netherlands, 1992), pp. 383-402.
  • 12
    • 51249173305 scopus 로고    scopus 로고
    • K.Ishida, T. Nishizawa, and M. E. Schlesinger, J. Phase Equilibria 12, 578 (1991).
    • K.Ishida, T. Nishizawa, and M. E. Schlesinger, J. Phase Equilibria 12, 578 (1991).
  • 13
    • 51249171309 scopus 로고    scopus 로고
    • K. Ishida and T. Nishizawa, J. Phase Equilibria 12, 77 (1991).
    • K. Ishida and T. Nishizawa, J. Phase Equilibria 12, 77 (1991).
  • 14
    • 0026822754 scopus 로고    scopus 로고
    • S. Mantl, Mater. Sci. Rep. 8, 1 (1992).
    • S. Mantl, Mater. Sci. Rep. 8, 1 (1992).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.