Ion beam synthesis of epitaxial silicides: fabrication, characterization and applications

Materials Science Reports

Volumn 8, Issue 1-2, 1992, Pages 1-95

  Mantl, S ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATIONS; COBALT SILICON ALLOYS; CRYSTALS - EPITAXIAL GROWTH; HEAT TREATMENT - ANNEALING; METALS AND ALLOYS - HEAT TREATMENT; METALS AND ALLOYS - SYNTHESIS; SILICON AND ALLOYS - MICROSTRUCTURE;

ANNEALING PARAMETERS; EPITAXIAL SILICIDES; MESOTAXY;

SILICON AND ALLOYS;

EID: 0026822754     PISSN: 09202307     EISSN: None     Source Type: Journal    
DOI: 10.1016/0920-2307(92)90006-M     Document Type: Review

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