Laser removal of oxides and particles from copper surfaces for microelectronic fabrication

Optics Express

Volumn 7, Issue 2, 2000, Pages 68-76

  Lee, J M ^a   Watkins, K G ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; ACOUSTICS; COPPER; LASER BEAM EFFECTS; LASERS; MONITORING; OXIDES; PRINTED CIRCUIT BOARDS; Q SWITCHED LASERS; SURFACE CLEANING;

ACOUSTIC MONITORING; LASER MATERIALS PROCESSING; OPTICAL FABRICATION; PRINTED CIRCUIT BOARDS (PCB);

MICROELECTRONICS;

EID: 0008366462     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OE.7.000068     Document Type: Article

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