Laser cleaning of ablation debris from CO 2 -laser-etched vias in polyimide

Applied Surface Science

Volumn 127-129, Issue , 1998, Pages 731-737

  Coupland, Kristen ^a   Herman, Peter R ^a   Gu, Bo ^b  

^a UNIVERSITY OF TORONTO   (Canada)

^b Lumonics Inc   (Canada)

Author keywords

Ablation debris; Dry laser cleaning; Laser ablation; Polyimide

Indexed keywords

CARBON DIOXIDE LASERS; ELECTROMAGNETIC WAVE DIFFRACTION; LASER ABLATION; PULSED LASER APPLICATIONS; SOOT; SUBSTRATES; SURFACE CLEANING; THERMAL EXPANSION;

DRY LASER CLEANING; FLEX CIRCUITS; FRESNEL DIFFRACTION;

POLYIMIDES;

EID: 0032070604     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00733-2     Document Type: Article

References (24)

1. R.J. Jensen, J.H. Lai, in: J.H. Lai (Ed.), Polymers for Electronic Applications, CRC Press, Boca Raton, FL, 1989.
2. K. Jain, J. Hoffman, T. Dunn, W. Polster, D. Panchal, Large-area, high-throughput, high-resolution patterning and via-drilling system, 1995 International Conference on Multichip Modules Proceedings ICEMCM '95, 1995, p. 327.
3. R. Srinivasan, B. Braren, Ultraviolet laser ablation of organic polymers, Chem. Rev. 89 (1989) 1303.
4. J.H. Brannon, J.R. Lankard, A.I. Baise, F. Burns, J. Kaufman, Excimer laser etching of polyimide, J. Appl. Phys. 58 (1985) 2036.
5. R. Srinivasan, B. Braren, D.E. Seeger, R.W. Dreyfus, Ultraviolet laser ablation of organic polymer films, Macromolecules 19 (1986) 916.
6. G. Koren, U.P. Oppenheim, Laser ablation of polymers in pressurized gas ambients, Appl. Phys. B 42 (1987) 41.
7. R.S. Taylor, K.E. Leopold, D.L. Singleton, G. Paraskevopoulos, R.S. Irwin, The effect of debris formation on the morphology of excimer laser ablated polymers, J. Appl. Phys. 64 (1988) 2815.
8. W.R. Creasy, J.T. Brenna, Large carbon cluster ion formation by laser ablation of polyimide and graphite, Chem. Phys. 126 (1988) 453.
9. S.G. Hansen, Study of ultraviolet-laser ablation products of several polymers using time-of-flight mass spectroscopy, J. Appl. Phys. 66 (1989) 1411.
10. D.L. Singleton, G. Paraskevopoulos, R.S. Irwin, XeCl laser ablation of polyimide: Influence of ambient atmosphere on particulate and gaseous products, J. Appl. Phys. 66 (1989) 3324.
11. S. Kuper, J. Brannon, Ambient gas effects on debris formed during KrF laser ablation of polyimide, Appl. Phys. Lett. 60 (1992) 1633.
12. T. Ooie, I. Miyamoto, H. Maruo, Y. Hirota, T. Matsuyoshi, Y. Orii, Ablation of material by excimer laser under different gas pressures and species, International Conference on Applications of Lasers and Electro-Optics ICALEO '92, 1992, p. 480.
13. D. Patterson, M. Doscher, R. Gephard, Improving wire bond quality on multichip modules through reduction of polyimide ablation debris, SPIE Laser Radiation Photophysics, Vol. 1856, 1993, p. 155.
14. H.K. Tonshoff, D. Hesse, M. Gonschior, Microstructuring with excimer lasers and reduction of deposited ablation products using a special gas nozzle with a vacuum system, International Conference on Applications of Lasers and Electro-Optics ICALEO '94, 1994, p. 333.
15. 2 laser cleaning of black deposits formed during the excimer laser etching of polyimide in air, Appl. Phys. B 45 (1988) 45.
16. 2 laser etching of polyimide, Appl. Phys. Lett. 48 (1986) 1226.
17. R. Braun, R. Novak, P. Hess, H. Oetzmann, C. Schmidt, Photoablation of polyimide with IR and UV laser radiation, Appl. Surf. Sci. 43 (1989) 352.
18. R. Srinivasan, Ablation of polyimide (Kapton) films by pulsed (ns) ultraviolet and infrared (9.17 μm) lasers, Appl. Phys. A 56 (1993) 417.
19. 2 laser etching of polyimide, MSc Thesis, University of Toronto, 1996.
20. J.D. Kelley, M.I. Stuff, F.E. Hovis, G.J. Linford, Removal of small particles from surfaces by pulsed laser irradiation: observations and a mechanism, Modeling and Simulation of Laser Systems II, SPIE Vol. 1415, 1991, p. 211.
21. W. Zapka, W. Ziemlich, A.C. Tam, Efficient pulsed laser removal of 0.2 μm sized particles from a solid surface, Appl. Phys. Lett. 58 (1991) 2217.
22. W. Zapka, Particulate removal from a surface by excimer laser irradiation, Conference on Lasers and Electro-Optics CLEO '90 Conf. Digest, 1990, p. 226.
23. H.M. van Driel, J.E. Sipe, J.F. Young, Laser-induced periodic surface structure on solids: A universal phenomenon, Phys. Rev. Lett. 49 (1982) 1955.
24. J.E. Sipe, J.F. Young, J.S. Preston, H.M. van Driel, Laser-induced periodic surface structure: 1. Theory, Phys. Rev. B 27 (1983) 1141.