Metal-oxide-semiconductor field-effect transistor junction requirements

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 1, 1998, Pages 306-311

  Duane, Michael ^a   Lynch, William ^b  

^a ADVANCED MICRO DEVICES   (United States)

^b SEMICONDUCTOR RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008006835     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589800     Document Type: Article

References (11)

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