Electrical properties and uniformity of two dimensional electron gases grown on cleaned SiGe virtual substrates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1644-1647

  Paul, D J ^a   Ahmed, A ^a   Pepper, M ^a   Churchill, A C ^b   Robbins, D J ^b   Wallis, D J ^b   Pidduck, A J ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008006829     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589953     Document Type: Article

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