Corrosion-free dry etch patterning of magnetic random access memory stacks: Effects of ultraviolet illumination

Journal of Applied Physics

Volumn 87, Issue 9 III, 2000, Pages 6397-6399

  Cho, H ^a   Lee, K P ^a   Jung, K B ^a,d   Pearton, S J ^a   Marburger, J ^b   Sharifi, F ^b   Hahn, Y B ^c   Childress, J R ^d  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

^b University of Florida   (United States)

^c Chonbuk National University   (South Korea)

^d IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007911236     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372718     Document Type: Article

References (8)

1. See, for example, IBM J. Res. Develop. 42, 3 (1998).
2. K. B. Jung, H. Cho, Y. B. Hahn, E. S. Lambers, S. Onishi, D. Johnson, A. T. Hurst, J. R. Childress, Y. D. Park, and S. J. Pearton, J. Appl. Phys. 85, 4788 (1999).
3. K. B. Jung, J. Marburger, F. Shrifi, Y. D. Park, E. S. Lambers, and S. J. Pearton, J. Vac. Sci. Technol. B (in press).
4. K. S. Choi and C.-H. Han, J. Electrochem. Soc. 145, L37 (1998).
5. K. S. Choi and C.-H. Han, Jpn. J. Appl. Phys., Part 1 37, 4103 (1998).
6. M. S. Kwon, J. Y. Lee, K.-S. Choi, and C.-H. Han, Jpn. J. Appl. Phys., Part 1 37, 5945 (1998).
7. M. S. Kwon and J. Y. Lee, J. Electrochem. Soc. 146, 3119 (1999).
8. K. B. Jung, E. S. Lambers, J. R. Childress, S. J. Pearton, M. Jenson, and A. T. Hurst, Appl. Phys. Lett. 71, 1255 (1997).