Reliability of Bipolar and MOS Circuits after FIB Modification

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2001, Pages 289-298

  Desplats, Romain ^a   Courrege, Jean Christophe ^a   Benteo, Bruno ^a   Antoniou, Nicholas ^b   Monforte, David ^c  

^a CNES   (France)

^b VM Labs Inc   (United States)

^c Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC SHIELDS; FOCUSED ION BEAMS (FIB);

ANNEALING; DEGRADATION; ELECTRIC POTENTIAL; ENERGY TRANSFER; ION BEAMS; IRRADIATION; LIFE CYCLE; MOS DEVICES; PASSIVATION; RELIABILITY; SEMICONDUCTOR MATERIALS; STATIC RANDOM ACCESS STORAGE; TRANSISTORS;

BIPOLAR INTEGRATED CIRCUITS;

EID: 0005969923     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. R.G. Lee and J.C Morgan, "Integration of Focused Ion Beam System in a Failure Analysis Environment", Proc. of the 17th Int. Symp. for Testing and Failure Analysis, ISTFA'91, Nov. 1991, pp 85-95
2. A. Campbell, et. al., "Effect of Focused Ion Beam Irradiation on MOS Transistors", Proc. 35th Annual International Reliability Physics Symposium, IRPS'97, April 1997, pp 72-81
3. J. Benbrik, et al., " Focused Ion Beam Irradiation Induced Damages on CMOS and Bipolar Technologies", ", ISTFA,Nov 1998, p49
4. A. Campbell, et. Al., "Focused Ion Beam Effects on MOS Transistor parameters", ISTFA, Nov. 1999, p273
5. J. Benbrik, et. Al.., "2D Physical simulation of degradation on transistors induced by FIB exposure of dielectric passivation", ", ESREF, Oct. 1999
6. M. Zaragoza, "Reliability Test Results for Pt FIB Interconnect Structures", p. 263, ISTFA, Nov. 1999
7. Nucl Instrum Method Phys Res B.7/8 851, E. Miyauchi and H. Hashimoto, 1985
8. Y. Danto, "Electrical properties of thin isolators, Doctorate, University of Bordeaux, 1976.
9. J. Benbrik, "Characterization of Degradations induced by Focused Ion Beam on integrated circuits", Doctorate, University of Bordeaux, 1999.
10. G. Barbottin, A. Vapaille, "Instabilities in Silicon Devices", North-Holland, volume 2, p26, p768, p790, 1989.
11. Oral presentation at the 1999 FIB user group at the ESREF conference, 4 Oct 1999.