Reliability Test Results for Pt FIB Interconnect Structures

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 1999, Pages 263-272

  Zaragoza, Michael ^a  

^a CADENCE DESIGN SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSED ION BEAMS (FIB); STRESS TESTING;

DEPOSITION; DIES; ION BEAMS; PHASE DIAGRAMS; RELIABILITY; STRESS ANALYSIS; THERMAL CYCLING;

PLATINUM;

EID: 1542300928     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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9. th Ed., Butterworths, 1976, pp. 403.
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11. Tao, et. al., "Focused Ion Beam Induced Deposition of Platinum for Repair Processes", J. Vac. Sci. Technolo. B9(1), Jan/Feb 1991