Observation of voltage contrast in non contact resonant mode atomic force microscopy

Microelectronic Engineering

Volumn 31, Issue 1-4, 1996, Pages 215-225

  Girard, P ^a   Cohen Solal, G ^a   Belaidi, S ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; ELECTRIC INSULATORS; ELECTRON RESONANCE; ELECTROSTATICS; INTEGRATED CIRCUITS; SENSITIVITY ANALYSIS;

FORCE GRADIENTS; NONCONTACT RESONANT MODE; VOLTAGE CONTRAST; VOLTAGE DETECTION;

ATOMIC FORCE MICROSCOPY;

EID: 0030085136     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00344-4     Document Type: Article

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