Effect of tip shape in the design of long distance electrostatic force microscopy

Microelectronics Reliability

Volumn 37, Issue 10-11, 1997, Pages 1627-1630

  Belaidi, S ^a   Girard, P ^a   Leveque, G ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; MATHEMATICAL MODELS;

ELECTROSTATIC FORCE MICROSCOPY; EQUIVALENT CHARGE MODEL;

MICROSCOPIC EXAMINATION;

EID: 0031247681     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(97)00126-1     Document Type: Article

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