Microstructure and photovoltaic properties of low temperature polycrystalline silicon solar cells fabricated by VHF-GD CVD using fluorinated gas

Journal of Non-Crystalline Solids

Volumn 266-269 B, Issue , 2000, Pages 1088-1093

  Ro, K ^a   Nakahata, K ^a   Kamiya, T ^a   Fortmann, C M ^a   Shimizu, I ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005419375     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0022-3093(99)00908-4     Document Type: Article

References (13)

1. J. Meier, S. Dubail, J. Cuperus, U. Kroll, R. Platz, P. Torres, J.A. Anna Selvan, P. Pernet, N. Beck, N.P. Vaucher, Ch. Hof, D. Fischer, H. Keppner, A. Shah, J. Non-Cryst. Solids 227-230 (1998) 1250.
2. S. Ishihara, D. He, T. Akasaka, Y. Araki, I. Shimizu, Mater. Res. Soc. Symp. Proc. 297 (1993) 79.
3. D. He, N. Okada, I. Shimizu, Solar Energy Mater. Solar Cells 34 (1994) 271.
4. M. Nakata, I. Shimizu, Mater. Res. Soc. Symp. Proc. 283 (1993) 591.
5. K. Nakahata, A. Miida, T. Kamiya, C.M. Fortmann, I. Shimizu, Thin Solid Films 337 (1999) 45.
6. Y. Miyamoto, A. Miida, I. Shimizu, Mater. Res. Soc. Symp. Proc. 452 (1997) 995.
7. T. Kamiya, K. Ro, C.M. Fortmann, I. Shimizu, Jpn. J. Appl. Phys. 38 (1999) 5762.
8. S. Ishihara, D. He, M. Nakata, I. Shimizu, Jpn. J. Appl. Phys. 32 (1993) 1539.
9. S. Ishihara, D. He, I. Shimizu, Jpn. J. Appl. Phys. 33 (1994) 51.
10. T. Komaru, S. Shimizu, M. Kanbe, Y. Maeda, T. Kamiya, C.M. Fortmann, I. Shimizu, Jpn. J. Appl. Phys. 38 (1999) 5796.
11. K. Saito, M. Sano, K. Ogawa, I. Kajita, J. Non-Cryst. Solids 164-166 (1993) 689.
12. T. Kaneko, K. Onisawa, M. Wakagi, Y. Kita, T. Minemura, Jpn. J. Appl. Phys. 32 (1993) 4907.
13. T. Kamiya, K. Nakahata, K. Ro, C.M. Fortmann, I. Shimizu, Mater. Res. Soc. Symp. Proc. (1999) in press.