Epitaxy-like growth of polycrystalline silicon on the seed crystallites grown on glass

Materials Research Society Symposium - Proceedings

Volumn 452, Issue , 1997, Pages 995-1001

  Miyamoto, Y ^a   Miida, A ^a   Shimizu, I ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; HYDROGEN; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON;

HOT WIRE TECHNIQUE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE SILICON;

THIN FILMS;

EID: 0030687345     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)