Structure and growth of hydrogenated microcrystalline silicon: Investigation by transmission electron microscopy and raman spectroscopy of films grown at different plasma excitation frequencies

Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties

Volumn 75, Issue 1, 1997, Pages 31-47

  Luysberg, M ^a,b   Hapke, P ^a   Carius, R ^a   Finger, F ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038969740     PISSN: 01418610     EISSN: None     Source Type: Journal    
DOI: 10.1080/01418619708210280     Document Type: Article

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