Development of EUV free-standing multilayer polarizers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2873, Issue , 1996, Pages 74-77

  Hu, Weibing ^a   Yamamoto, Masaki ^a   Watanabe, Makoto ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT POLARIZATION; OPTICAL DEVICES; OPTICAL INSTRUMENTS;

MULTILAYER POLARIZERS; QUARTER WAVE-PLATE; RELIABLE METHODS; TRANSMISSION MULTILAYERS;

MULTILAYERS;

EID: 0040520931     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.246184     Document Type: Conference Paper

References (4)

1. J. B. Kortright and J. H. Underwood, "Multilayer optical elements for generation, and analysis of circularly polarized X-Rays, " Nucl. Instr. Meth. Phys. Res., A291, 272 (1990).
2. H. Nomura, K. Mayama, T. Sasaki, M. Yamamoto and M. Yanagihara, "Design, fabrication, and polarization of soft-x-ray transmission multilayers, " SPIE Proc. 1720, 395 (1992).
3. M. Yamamoto, K. Mayama, H. Nomura, H. Kimura, M. Yanagihara and T. Namioka, "Soft-xray polarixation measurement with a laboratory reflectometer, " SPIE Proc. 1720, 390 (1992).
4. B. L. Henke, E. M. Gullikson and J. C. Davis, "X-Ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30, 000 eV, Z = 1-92", Atom. Data and Nucl. Data Tables, 54, 181-342 (1993).