SCOPUS 정보 검색 플랫폼

Volumn 313-314, Issue , 1998, Pages 751-755

Ellipsometry in the extreme ultraviolet region with multilayer polarizers

Author keywords

Ellipsometry; Extreme ultraviolet; Multilayer; Polarimetry; Polarizer

Indexed keywords

LIGHT EXTINCTION; LIGHT POLARIZATION; MULTILAYERS; POLARIMETERS; REFRACTIVE INDEX; SURFACES; THIN FILMS; ULTRAVIOLET SPECTROSCOPY;

EXTINCTION COEFFICIENT; MULTILAYER POLARIZATION;

ELLIPSOMETRY;

EID: 0031999922 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00991-7 Document Type: Article

Times cited : (5)

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