Sample rotation and reduced surface roughening in oblique incidence ion sputtering erosion

Vacuum

Volumn 49, Issue 4, 1998, Pages 285-295

  Carter, G ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003005924     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(97)00180-2     Document Type: Article

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