Shallow buried SiNx layers

Journal of Applied Physics

Volumn 87, Issue 11, 2000, Pages 8201-8203

  Barbadillo, L ^a   Hernandez M J ^a   Cervera, M ^a   Rodriguez P ^a   Piqueras, J ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002477943     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373520     Document Type: Article

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