High-energy recoil implantation of boron into silicon

Applied Physics Letters

Volumn 76, Issue 26, 2000, Pages 3953-3955

  Shao, Lin ^a   Lu, Xinming ^a   Jin, Jianyue ^a   Li, Qinmian ^a   Liu, Jiarui ^a   Van Der Heide, P A W ^b   Chu, Wei Kan ^a  

^a University of Houston   (United States)

^b UNIVERSITY OF HOUSTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001742487     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126832     Document Type: Article

References (13)

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