Room-temperature diffusivity of self-interstitials and vacancies in ion-implanted Si probed by in situ measurements

Applied Physics Letters

Volumn 73, Issue 23, 1998, Pages 3369-3371

  Coffa, Salvatore ^a   Libertino, Sebania ^a  

^a CNR IMETEM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001192587     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122753     Document Type: Article

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