Hole transport investigation in unstrained and strained SiGe

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1667-1669

  Bufler, F M ^a,d   Graf, P ^a,e   Meinerzhagen, B ^a   Fischer, G ^b   Kibbel, H ^c  

^a UNIVERSITY OF BREMEN   (Germany)

^b IHP   (Germany)

^c DAIMLER AG   (Germany)

^d Inst für Integrierte Systeme   (Switzerland)

^e Micronas GmbH Freiburg   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001654172     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590215     Document Type: Article

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