Room-temperature Ohmic contact on n-type GaN with surface treatment using Cl2 inductively coupled plasma

Applied Physics Letters

Volumn 78, Issue 14, 2001, Pages 2015-2017

  Jang, Ho Won ^a   Jeon, Chang Min ^a   Kim, Jong Kyu ^a   Lee, Jong Lam ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001558923     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1360784     Document Type: Article

References (10)

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