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Journal of Applied Physics

Volumn 82, Issue 10, 1997, Pages 5265-5267

Angular spectroscopic analysis: An optical characterization technique for laterally oxidized AlGaAs layers

(7) Heremans, P a Kuijk, M a,b Windisch, R a Vanderhaegen, J a De Neve, H a Vounckx, R a Borghs, G a

a IMEC (Belgium)

b VRIJE UNIVERSITEIT BRUSSEL (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR DEPENDENCE; CAVITY STRUCTURE; CROSS SECTION; FABRY-PEROT; LAYER STRUCTURES; OPTICAL CHARACTERIZATION TECHNIQUE; OXIDE LAYER THICKNESS; SAMPLE PREPARATION;

LIGHT REFRACTION; REFRACTIVE INDEX; REFRACTOMETERS; TRANSMISSION ELECTRON MICROSCOPY;

SPECTROSCOPIC ANALYSIS;

EID: 0001518582 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.366395 Document Type: Article

Times cited : (8)

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