Correlation between nitrogen concentration profile and infrared spectroscopy in silicon dioxide

Applied Physics Letters

Volumn 72, Issue 18, 1998, Pages 2280-2282

  Chang Liao, Kuei Shu ^a   Lai, Han Chao ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001441259     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121336     Document Type: Article

References (12)

1. H. Hwang, W. Ting, B. Maiti, D. L. Kwong, and J. Lee, Appl. Phys. Lett. 57, 1010 (1990).
2. K. S. Chang-Liao and T. Y. Lan, Jpn. J. Appl. Phys., Part 2 35, L968 (1996).
3. A. E. Kuiper, H. G. Pomp, and P. M. Asveld, Appl. Phys. Lett. 61, 1031 (1992).
4. E. C. Carr and R. A. Buhrman, Appl. Phys. Lett. 63, 54 (1993).
5. Y. Okada, P. J. Tobin, V. Lakhotia, W. A. Feil, S. A. Ajuria, and R. I. Hegde, Appl. Phys. Lett. 63, 194 (1993).
6. E. C. Carr, K. A. Ellis, and R. A. Buhrman, Appl. Phys. Lett. 66, 1492 (1995).
7. K. S. Chang-Liao and L. C. Chen, Jpn. J. Appl. Phys., Part 2 36, L604 (1997).
8. K. S. Chang-Liao and L. C. Chen, J. Vac. Sci. Technol. B 15, 942 (1997).
9. R. P. Vasquez and A. Madhukar, Appl. Phys. Lett. 47, 998 (1985).
10. I. W. Boyd and J. I. B. Wilson, J. Appl. Phys. 53, 4166 (1982).
11. P. Lange, J. Appl. Phys. 66, 201 (1989).
12. T. Kubota and M. Kamoshida, Jpn. J. Appl. Phys. 11, 15 (1972).