Surface modification of α-Al2O3(0001) by N2+ ion irradiation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3311-3313

  Choi, Won Kook ^a   Choi, Sung Chang ^a   Jung, Hyung Jin ^a   Koh, Seok Keun ^a   Byun, DongJin ^b   Kum, Dong Wha ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001400123     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581539     Document Type: Article

References (13)

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