Computerized interferometric measurement of surface microstructure

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2782, Issue , 2004, Pages 26-37

  Wyant, James C ^a   Schmit, Joanna ^b  

^a WYKO Corporation   (United States)

^b UNIVERSITY OF ARIZONA   (United States)

Author keywords

Coherence Sensing; Interference; Interference Microscope; Interferometry; Metrology; Phase shifting Interferometry; Surface Measurement

Indexed keywords

COHERENCE SENSING; INTERFERENCE; INTERFERENCE MICROSCOPES; METROLOGY; PHASE SHIFTING INTERFEROMETRY;

MICROSCOPES; MICROSTRUCTURE; OPTICAL TESTING; PHASE MEASUREMENT; SENSORS; SURFACE MEASUREMENT;

INTERFEROMETRY;

EID: 78951471299     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.250754     Document Type: Conference Paper

References (13)

1. P. Carré, "Installation et Utilisation du comparateur photoelectrique et interferential du Bureau International des Poids de Measures," Metrologia 2, 13 (1966).
2. J. C. Wyant, "Use of an ac heterodyne lateral shear interferometer with real-time wavefront corrections systems," Appl. Opt. 14(11):2622-2626, Nov. 1975.
3. K. Creath, "Phase-Shifting Interferometry Techniques," in Progress in Optics XXVI, E. Wolf, ed. (Elsever Science, 1988), pp. 357-373.
4. B. Bhushan, J.C. Wyant and C.L. Koliopoulos, "Measurement of surface topography of magnetic tapes by Mirau interferometry", Appl. Opt., 28:1489-1497, 1985.
5. J.C. Wyant, "Optical profilers for surface roughness", Proceedings of the Society of Photo-Optical Instrumentation Engineers, 525, 174-180, 1985.
6. Yeou-Yen Cheng and J. C. Wyant, "Two-wavelength phase shifting interferometry," Appl. Opt. 23(24):4539-4543 (1984).
7. Yeou-Yen Cheng and James C. Wyant, "Multiple-wavelength phase-shifting interferometry," Appl. Opt. 24(6):804-807 (1985).
8. K. Creath, Y.-Y. Cheng, and J. C. Wyant, "Contouring aspheric surfaces using two-wavelength phase-shifting interferometry," Optica Acta 32(12): 1455-1464 (1985).
9. M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, "An Application of Interference Microscopy to Integrated Circuit Inspection and Metrology," Proc. SPIE, 775, 233-247 (1987).
10. G. S. Kino and S. Chim, "Mirau Correlation Microscope," Appl. Opt. 29, 3775-3783 (1990).
11. T. Dresel, G. Hausler, and H. Venzke, "Three-dimensional sensing of rough surfaces by coherence radar," Appl. Opt. 31(7):919-3925, March 1992.
12. P. J. Caber, "An Interferometric Profiler for Rough Surfaces," Appl. Opt. 32 (19):3438-3441, July 1993.
13. James C. Wyant, "Computerized interferometric measurement of surface microstructure," Proc. SPIE 2576:122-130, (1995).