Developing the chemistry of novel scandium β-diketonates for the MOCVD of scandium-containing oxides

Chemical Vapor Deposition

Volumn 5, Issue 6, 1999, Pages 261-264

  Fleeting, Kirsty A ^b   Davies, Hywel O ^b   Jones, Anthony C ^a   O'Brien, Paul ^b   Leedham, Timothy J ^a   Crosbie, Michael J ^c   Wright, Peter J ^c   Williams, Dennis J ^c  

^a Inorgtech Limited   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

^c DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

Author keywords

Lead scandium tantalate; Liquid injection MOCVD; Scandium oxide; Scandium diketonate precursors

Indexed keywords

EID: 0001347597     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-3862(199912)5:6<261::AID-CVDE261>3.0.CO;2-2     Document Type: Article

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