Neutral pumping in a helicon discharge

Plasma Sources Science and Technology

Volumn 7, Issue 3, 1998, Pages 416-422

  Gilland, J ^a   Breun, R ^a   Hershkowitz, N ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN GASES; HELICONS; IONIZATION OF GASES; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; PLASMA CONFINEMENT; PLASMA DENSITY; PLASMA WAVES;

HELICON DISCHARGES; PLASMA ELECTRON DENSITY; PLASMA ELECTRON TEMPERATURE;

ELECTRIC DISCHARGES;

EID: 0032139797     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/3/020     Document Type: Article

References (16)

1. Campbell G A, de Chambrier A, Mendoza F, Parker N W, Pearson D I C, Tokunaga K, Tsukada T, Mashiro S and Nogami H 1992 MORI™ High Density RF Plasma Source Etching of Poly silicon and Metal Films on Wafers SPIE vol 1803 (Bellingham, WA: SPIE) pp 226-34
2. Perry A J, Vender D and Boswell R W 1991 The application of the helicon source to plasma processing J. Vac. Sci. Technol. B 9 310-17
3. Chen F F 1989 R F production of high density plasmas for accelerators Laser Particle Beams 7 551-9
4. Lehane J A and Thonemann P C 1965 An experimental study of helicon wave propagation in a gaseous plasma Proc. Phys. Soc. 85
5. Boswell R W and Porteous K 1987 Large volume, high density rf inductively coupled plasma Appl. Phys. Lett. 50
6. Chen F F 1991 Ionization by helicon waves Plasma Phys. Controlled Fusion 33 339
7. Ellingboe A R, Boswell R W, Booth J P and Sadeghi N Electron beam pulses produced by helicon wave excitation Phys. Plasmas 2 1807
8. Hershkowitz N, Cho M and Pruski J 1992 Mechanical variation of plasma potential, electron temperature, and plasma density Plasma Sources Sci. Technol. 1 87-93
9. Jephcott D F and Stocker PM 1962 Hydromagnetic waves in a cylindrical plasma: an experiment Fluid Mech. 13
10. Hershkowitz N 1989 How Langmuir probes work Plasma Diagnostics Vol 1: Discharge Parameters 1st edn, ed O Auciello and D L Flamm (Boston, MA: Academic) 113-83
11. Boswell R W 1984 Very efficient plasma generation by whistler waves near the lower hybrid frequency Plasma Phys. Controlled Fusion 26 1147-62
12. Degeling A W, Jung C O, Boswell R W and Ellingboe A R 1996 Plasma production from helicon waves Phys. Plasmas 3 2788-96
13. Chen F F 1992 Experiments on helicon plasma sources J. Vac. Sci. Technol. A 10 1389-401
14. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley) pp 77-81
15. Shoji T, Sakawa Y, Nakazawa S, Kadota K and Sato T 1993 Plasma Sources Sci. Technol. 2 5
16. Light M and Chen F F 1995 Helicon wave excitation with helical antennas Phys. Plasmas 2 1084-93