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Volumn 7, Issue 3, 1998, Pages 416-422

Neutral pumping in a helicon discharge

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN GASES; HELICONS; IONIZATION OF GASES; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; PLASMA CONFINEMENT; PLASMA DENSITY; PLASMA WAVES;

EID: 0032139797     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/3/020     Document Type: Article
Times cited : (80)

References (16)
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    • The application of the helicon source to plasma processing
    • Perry A J, Vender D and Boswell R W 1991 The application of the helicon source to plasma processing J. Vac. Sci. Technol. B 9 310-17
    • (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 310-317
    • Perry, A.J.1    Vender, D.2    Boswell, R.W.3
  • 3
    • 84974489028 scopus 로고
    • R F production of high density plasmas for accelerators
    • Chen F F 1989 R F production of high density plasmas for accelerators Laser Particle Beams 7 551-9
    • (1989) Laser Particle Beams , vol.7 , pp. 551-559
    • Chen, F.F.1
  • 4
    • 11744348780 scopus 로고
    • An experimental study of helicon wave propagation in a gaseous plasma
    • Lehane J A and Thonemann P C 1965 An experimental study of helicon wave propagation in a gaseous plasma Proc. Phys. Soc. 85
    • (1965) Proc. Phys. Soc. , vol.85
    • Lehane, J.A.1    Thonemann, P.C.2
  • 5
    • 11744347315 scopus 로고
    • Large volume, high density rf inductively coupled plasma
    • Boswell R W and Porteous K 1987 Large volume, high density rf inductively coupled plasma Appl. Phys. Lett. 50
    • (1987) Appl. Phys. Lett. , vol.50
    • Boswell, R.W.1    Porteous, K.2
  • 8
    • 0041724872 scopus 로고
    • Mechanical variation of plasma potential, electron temperature, and plasma density
    • Hershkowitz N, Cho M and Pruski J 1992 Mechanical variation of plasma potential, electron temperature, and plasma density Plasma Sources Sci. Technol. 1 87-93
    • (1992) Plasma Sources Sci. Technol. , vol.1 , pp. 87-93
    • Hershkowitz, N.1    Cho, M.2    Pruski, J.3
  • 9
    • 0041182941 scopus 로고
    • Hydromagnetic waves in a cylindrical plasma: An experiment
    • Jephcott D F and Stocker PM 1962 Hydromagnetic waves in a cylindrical plasma: an experiment Fluid Mech. 13
    • (1962) Fluid Mech. , vol.13
    • Jephcott, D.F.1    Stocker, P.M.2
  • 11
    • 34648837822 scopus 로고
    • Very efficient plasma generation by whistler waves near the lower hybrid frequency
    • Boswell R W 1984 Very efficient plasma generation by whistler waves near the lower hybrid frequency Plasma Phys. Controlled Fusion 26 1147-62
    • (1984) Plasma Phys. Controlled Fusion , vol.26 , pp. 1147-1162
    • Boswell, R.W.1
  • 13
    • 84957342724 scopus 로고
    • Experiments on helicon plasma sources
    • Chen F F 1992 Experiments on helicon plasma sources J. Vac. Sci. Technol. A 10 1389-401
    • (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 1389-1401
    • Chen, F.F.1
  • 16
    • 36449003200 scopus 로고
    • Helicon wave excitation with helical antennas
    • Light M and Chen F F 1995 Helicon wave excitation with helical antennas Phys. Plasmas 2 1084-93
    • (1995) Phys. Plasmas , vol.2 , pp. 1084-1093
    • Light, M.1    Chen, F.F.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.