Nitrogen and hydrogen in thick diamond films grown by microwave plasma enhanced chemical vapor deposition at variable H2 flow rates

Journal of Applied Physics

Volumn 87, Issue 12, 2000, Pages 8741-8746

  Nistor, S V ^a   Stefan, M ^a   Ralchenko, V ^b   Khomich, A ^c   Schoemaker, D ^d  

^a NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

^b PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^c INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

^d UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001183891     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373604     Document Type: Article

References (29)

1. M. Hoinkis, E. R. Weber, M. I. Landstrass, M. A. Plano, S. Han, and D. R. Kania, Appl. Phys. Lett. 59, 1870 (1991).
2. W. V. Smith, P. P. Sorokin, I. L. Gelles, and G. J. Lasher, Phys. Rev. 115, 1546 (1959).
3. J. H. Loubser and J. A. Van Wyk, Rep. Prog. Phys. 41, 1203 (1978).
4. C. F. O. Graeff, C. E. Nebel, M. Stutzmann, A. Floter, and R. Zachai, J. Appl. Phys. 81, 234 (1997).
5. A. Bergmaier, G. Dollinger, T. Faestermann, C. M. Frey, M. Ferguson, H. Guttler, G. Sculz, and H. Willersheid, Diamond Relat. Mater. 5, 995 (1996).
6. X. Zhou, G. D. Watkins, and K. M. McNamara Rutledge, Mater. Sci. Forum 196-201, 825 (1996); X. Zhou, G. D. Watkins, K. M. McNamara Rutledge, R. P. Messmer, and S. Chawla, Phys. Rev. B 54, 7881 (1996).
7. X. Zhou, G. D. Watkins, and K. M. McNamara Rutledge, Mater. Sci. Forum 196-201, 825 (1996); X. Zhou, G. D. Watkins, K. M. McNamara Rutledge, R. P. Messmer, and S. Chawla, Phys. Rev. B 54, 7881 (1996).
8. D. F. Talbot-Ponsonby, M. E. Newman, J. M. Baker, G. A. Scarsbrook, R. S. Sussman, A. J. Whitchead, and S. Pfenninger, Phys. Rev. B 57, 2264 (1998).
9. V. Ralchenko, I. Sychov, I. Vlasov, A. Vlasov, V. Konov, A. Khomich, and S. Voronina, Diamond Relat. Mater. 8, 189 (1999).
10. S. V. Nistor, M. Stefan, V. Ralchenko, E. Goovaerts, and D. Schoemaker, Rad. Effects Defects Solids 149, 303 (1999).
11. S. V. Nistor, M. Stefan, E. Goovaerts, D. Schoemaker, and V. Ralchenko, Proc. Joint 29th AMPERE - 13th ISMAR Intern. Conf., Berlin, 2-7 Aug. 1998. Tech. Univ. Berlin, 1998, p. 857.
12. D. F. Talbot-Ponsonby, M. E. Newman, J. M. Baker, G. A. Scarsbrook, R. S. Sussman, and A. J. Whitehead, Phys. Rev. B 57, 2302 (1998).
13. G. S. Woods, J. A. van Wyk, and A. T. Collins, Philos. Mag. B 62, 589 (1990).
14. K. Meykens, M. Nesladek, C. Quaeyhaegens, L. M. Stals, M. Vanecek, J. Rosa, G. Janssen, and J. J. Schermer, Diamond Relat. Mater. 5, 958 (1996).
15. A. V. Khomich, V. G. Ralchenko, A. A. Smolin, V. V. Migulin, S. M. Pimenov, I. I. Vlasov, and V. I. Konov, J. Chem. Vap. Deposition 5, 361 (1997).
16. M. H. Vaz de C. Nazare and A. J. T. das Neves, J. Phys. C 20, 2713 (1987).
17. R. S. Burns, V. Cvetkovich, C. N. Dodge, D. J. F. Evans, M. T. Roney, P. M. Spear, and C. M. Welbourn, J. Cryst. Growth 104, 257 (1990).
18. H. Sumiya and S. Satoh, Diamond Relat. Mater. 5, 1359 (1996).
19. E. D. Palik, Handbook of Optical Constants of Solids (Academic, Orlando, 1965).
20. I. Kiflawi, A. E. Mayer, P. M. Spear, J. A. Van Wyk, and G. S. Woods, Philos. Mag. B 69, 1141 (1994).
21. J. Koppitz, O. F. Schirmer, and M. Seal, J. Phys. C 19, 1123 (1986).
22. E. Rohrer, C. F. O. Graeff, R. Janssen, C. E. Nebel, M. Stutzann, H. Guttler, and R. Zachai, Phys. Rev. B 54, 7874 (1996).
23. P. Coudberg and Y. Catherine, Thin Solid Films 146, 93 (1987).
24. R. P. Chin, J. Y. Huang, Y. R. Chen, T. J. Chuang, and H. Seki, Phys. Rev. B 52, 5985 (1995).
25. A. V. Khomich, V. I. Polyakov, P. I. Perov, V. P. Varnin, I. G. Teremetskaya, V. G. Balakirev, and E. D. Obraztsova, in III-Nitride, SiC and Diamond Materials for Electronic Devices, edited by D. K. Gaskill, C. D. Brandt, and R. J. Nemanich, MRS Symposium Proceedings (Materials Research Society, Pittsburg, 1996), Vol. 423, p. 723.
26. L. Nistor, J. Van Landuyt, and V. Ralchenko, Phys. Status Solidi A 174, 5 (1999).
27. R. D. Maclear, J. E. Butler, S. H. Connell, B. P. Doyle, I. Z. Machi, D. B. Rebuli, J. P. F. Sellschope, and E. Sideras-Haddad, Diamond Relat. Mater. 8, 1615 (1999).
28. J. E. Butler, in Proceedings of the 4th International Symposium on Diamond Films and Related Materials, Kharkov, Ukraine, 1999, p. 348.
29. G. Z. Cao, J. J. Schermer, W. J. P. van Enckevort, W. A. L. M. Elst, and L. J. Giling, J. Appl. Phys. 79, 1357 (1996).