Oxidation properties of silicon dots on silicon oxide investigated using energy filtering transmission electron microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3938-3942

  Single, C ^a   Zhou, F ^a   Heidemeyer, H ^a   Prins, F E ^a   Kern, D P ^a   Plies, E ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001159548     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590441     Document Type: Article

References (11)

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