Mechanism of platinum-enhanced oxidation of silicon at low temperatures

Journal of Chemical Physics

Volumn 109, Issue 12, 1998, Pages 4997-5001

  Kobayashi, Hikaru ^a,b   Yuasa, Toshiro ^b   Yamanaka, Kazuhiro ^b   Yoneda, Kenji ^c   Todokoro, Yoshihiro ^c  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001129857     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.477112     Document Type: Article

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