Scatterometry of honed surfaces

Optical Engineering

Volumn 37, Issue 5, 1998, Pages 1435-1441

  Baumgart, Jörg W ^a   Truckenbrodt, Horst ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Diffraction; Honing; Linear multivariate regression; Process control; Roughness; Scattering

Indexed keywords

EID: 0001077928     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601659     Document Type: Article

References (21)

1. S. Jakobs, A. Duparré, and H. Truckenbrodt, "AFM and light scattering measurements of optical thin films for applications in the UV range," in 7th International Conf. on Metrology and Properties of Engineering Surfaces, pp. 337-352, Dept. of Production Engineering, Chalmers Univ., Goteborg, Sweden (1997).
2. T. V. Vorburger and E. C. Teague, "Optical techniques for on-line measurement of surface topography," Precision Eng. 3(2), 61-83 (1981).
3. R. Brodmann, O. Gerstorfer, and G. Thurn, "Optical roughness measuring instrument for fine-machined surfaces," Opt. Eng. 24(3), 408-413 (1985).
4. J. R. McNeil, S. S. H. Naqvi, S. M. Gaspar, K. C. Hickman, K. B. Bishop, L. M. Milner, R. H. Krukar, and G. A. Petersen, "Scatterometry applied to microelectronics processing," Microlithogr. World, pp. 16-22 (Nov./Dec. 1992).
5. Z. R. Hatab, J. R. McNeil, and S. S. H. Naqvi, "Sixteen-megabit dynamic random access memory trench depth characterization," J. Vac. Sci. Technol. B 13, 174-182 (1995).
6. C. J. Murnane, S. L. Raymond, S. Prins, S. S. Naqvi, and J. McNeil, "Scatterometry for 0.24-0.70 μm developed photoresist metrology," Proc. SPIE 2439, 427-436 (1995).
7. J. Bischoff, J. Baumgart, H. Truckenbrodt, and J. Bauer, "Photoresist metrology based on light scattering," Proc. SPIE 2725, 678-689 (1995).
8. B. Kleemann, J. Bischoff, and A. Wong, "Alternative rigorous method for photolithography simulation based on profile sampling," Proc. SPIE 2726, 334-347 (1996).
9. J. Bischoff and K. Hehl, "Single feature metrology by means of light scatter analysis," Proc. SPIE 3050, 574-585 (1997).
10. M. Bjuggren, L. Krummenacher, and L. Mattsson, "Characterization of engineering surfaces by infrared scattering," Opt. Eng. 36(3), 874-883 (1997).
11. J. C. Stover, Optical Scattering, Measurement and Analysis, SPIE, Bellingham, WA (1995).
12. P. Beckman and A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces, Pergamon, New York (1963).
13. D. J. Whitehouse, Handbook of Surface Metrology, IOP, London (1994).
14. J. Baumgart and H. Truckenbrodt, "Testing of turned surfaces," in Proc. 7th International Conf. on Metrology and Properties of Engineering Surfaces, Dept. of Production Engineering, Chalmers Univ., Goteborg, Sweden (1997).
15. E. V. Thomas, "A primer in multivariate calibration," Anal. Chem. 66, 795-804 (1995).
16. S. J. Haswell, Practical Guide to Chemometrics, Marcel Dekker, New York (1992).
17. J. Beyerer, Analyse von Riefentexturen, VDI Verlag, Düsseldorf (1994).
18. J. Beyerer and D. Krahe, "An objective method to quantify the balance of grooves of honed cylinder bores," in Proc. 7th International Conf. on Metrology and Properties of Engineering Surfaces, Dept. of Production Engineering, Chalmers Univ., Göteborg, Sweden (1997).
19. F. Chaton, F. Baume, L. Jouanet, and J. Y. Robic, "Characterization of surface roughness by heterodyne interferometry," Proc. SPIE 2775, 315-326 (1996).
20. J. Baumgart and H. Truckenbrodt, "Three dimensional analysis of machined surfaces by scatterometry," Proc. SPIE 3098, 116-124 (1997).
21. GOETZE-Honatlas, GOETZE AG (1988).