Three dimensional analysis of machined surfaces by scatterometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3098, Issue , 1997, Pages 116-124

  Baumgart, Jörg W ^a   Truckenbrodt, Horst ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

diffraction; linear multivariate regression; machined surfaces; process control; roughness; scattering

Indexed keywords

CONTACT LESS; CONTROL PURPOSE; LINEAR MULTIVARIATE REGRESSION; MACHINED SURFACE; MACHINING ERROR; METHODS OF DATA ANALYSIS; MICRO TOPOGRAPHY; ROUGH SURFACES; ROUGHNESS; SCATTERED LIGHT; SCATTEROMETRY; SMOOTH SURFACE; SPATIAL PARAMETERS; SURFACE PARAMETER; THREE-DIMENSIONAL ANALYSIS;

DATA REDUCTION; DIFFRACTION; INSPECTION; OPTICAL TESTING; REGRESSION ANALYSIS; SURFACE ROUGHNESS;

PROCESS CONTROL;

EID: 0005871827     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.281151     Document Type: Conference Paper

References (10)

1. th Int. Conf. on Metrology and Properties of Engineering surfaces, Goteborg (1997)
2. Stover, J. C, "Optical scattering, measurement and analysis", SPIE, Bellingham (1995)
3. Whitehouse, D. J., Handbook of surface metrology", IOP, London (1994)
4. Thomas, E. V., "A primer in multivariate calibration", Analytical Chemistry Vol. 66, pp.795-804, (1995)
5. th Int. Conf. on Metrology and Properties of Engineering surfaces, Goteborg (1997)
6. Haswell, S. J., "Practical Guide to Chemometrics", Marcel Dekker, New York (1992)
7. Bischoff, J., Baumgart, J., "Photoresist metrology based on light scattering", Proc. SPIE 2725-48 (1996), pp. 678-689
8. Chaton, F. et al.: "Characterization of surface roughness by heterodyne interferometry", Proc. Spie 2775, pp. 315-326, (1996)
9. Beyerer, J., "Analyse von Riefentexturen", VDI Verlag, Diisseldorf, (1994)
10. th Int. Conf. on Metrology and Properties of Engineering surfaces, Goteborg (1997)