Characterization of engineering surfaces by infrared scattering

Optical Engineering

Volumn 36, Issue 3, 1997, Pages 874-882

  Bjuggren, Måns ^a,c,d   Krummenacher, Laurent ^a,e,f   Mattsson, Lars ^a,b,g,h,i  

^a ACREO AB   (Sweden)

^b SPIE ^*

^c ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^d EUROPEAN COMMISSION   (Belgium)

^e EPFL   (Switzerland)

^f PAUL SCHERRER INSTITUTE   (Switzerland)

^g UPPSALA UNIVERSITY   (Sweden)

^h Surface Evaluation Laboratory   (Sweden)

ⁱ OPTICAL SOCIETY OF AMERICA   (United States)

Author keywords

Bidirectional reflectance distribution function (BRDF); Engineering surface; Infrared scattering; Quality control; Surface defects; Surface roughness

Indexed keywords

EID: 0039795502     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601253     Document Type: Article

References (26)

1. UBM Messtechnik GmbH, Ottostrasse 2, D-7505 Ettlingen, Germany.
2. Zygo Corporation, Laurel Brook Road, Middlefield, CT 06455-0448, USA.
3. Wyko Corporation, 2650 E. Elvira Road, Tucson, AZ 85706, USA.
4. W. H. Simmonds, R. J. Smith, R. E. Renton, G. Gregoriou, J. Tripp, C. H. F. Velzel, L. Mattsson, M. Bjuggren, H. J. Tiziani, and H. J. Jordan "Optical non-contact techniques for engineering surface metrology," Report EUR 16161 EN, European Commission, Luxembourg (1995).
5. J. M. Bennett and L. Mattsson, Introduction to Surface Roughness and Scattering, Optical Society of America, Washington (1989).
6. H. E. Bennett and J. O. Porteus, "Relation between surface roughness and specular reflectance at normal incidence," J. Opt. Soc. Am. A 51(2), 123-129 (1961).
7. H. E. Bennett, "Scattering characteristics of optical materials," Opt. Eng. 17(5), 480-488 (1978).
8. E. L. Church, H. A. Jenkinson, and J. M. Zavada, "Relationship between surface scattering and microtopographic features," Opt. Eng. 18(2), 125-136 (1979).
9. J. C. Stover, A. Serati, and C. H. Gillespie, "Calculation of surface statistics from light scatter," Proc. SPIE 429, 96-104 (1983).
10. J. Péters, "Messung des Mittenrauhwertes zylindrischer Teile wänrend des Schleifens," VDI-Berichte 90, 27-31 (1965).
11. T. A. Depew and R. D. Weir, "Surface roughness determination by the measuremem of reflectance," Appl. Opt. 10(4), 969-970 (1971).
12. T. D. Schiff and J. C. Stover, "Surface statistics determined from IR scatter," Proc. SPIE 1165, 52-59 (1989).
13. M. Bjuggren, L. Krummenacher, and L. Mattsson, "Non-contact roughness measurement of engineering surfaces by total integrated infrared scattering," Precision Engineering (accepted for publication).
14. "Standard practice for angle resolved optical scatter measurements on specular or diffuse surfaces," E 1392-90, pp. 899-908, American Society for Testing and Materials (1990).
15. T. D. Schiff, J. C. Stover, D. J. Wilson, B. D. Swimley, M. E. Southwood, and D. R. Bjork, "Design and review of a unique out-of-plane polarimetric scatterometer," Proc. SPIE 1753, 262-268 (1993).
16. Rubert surface standards, pocket version No. 130, Rubert & Co. Ltd., England.
17. Talystep, Rank Taylor Hobson Ltd., P.O. Box 36, Leicester LE20SL, England.
18. J. M. Bennett and J. H. Dancy, "Stylus profiling instrument for measuring statistical properties of smooth optical surfaces," Appl. Opt. 20(10), 1785-1802 (1981).
19. E. L. Church and J. M. Zavada, "Residual surface roughness of diamond-turned optics," Appl. Opt. 14(8), 1788-1795 (1975).
20. J. M. Elson and J. M. Bennett, "Vector scattering theory," Opt. Eng. 18(2), 116-124 (1979).
21. E. L. Church "The precision measurement and characterization of surface finish," Proc. SPIE 429, 86-95 (1983).
22. J. C. Stover, Optical Scattering: Measurement and Analysis, McGraw-Hill, New York (1990).
23. J. M. Elson and J. M. Bennett, "Calculation of the power spectral density function from surface profile data," Appl. Opt. 34(1), 201-208 (1995).
24. K. J. Stout, P. J. Sullivan, W. P. Dong, E. Mainsah, N. Luo, T. Mathia, and H. Zahouani, Three Dimensional Surface Topography - Measurement, Interpretation and Applications, K. J. Stout, Ed., BCR Information, Applied Metrology, Penton Press, London (1994).
25. E. L. Church, "Direct comparison of mechanical and optical measurements of the finish of precision-machined surfaces," Proc. SPIE 429, 105-112 (1983).
26. T. V. Vorburger, E. Marx, and T. R. Lettieri, "Regimes of surface roughness measurable with light scattering," Appl. Opt. 32(19), 3401-3408 (1993).