High aspect-ratio fine-line metallization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3511, Issue , 1998, Pages 357-363

  Chang, Chienlu ^a   Chang, Peizen ^a   Yen, Kaihsiang ^a   Lu, Sheyshi ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Fine line; High aspect ratio; Lift off; Metallization; Micromachining; Preimidized polyimide; Silicon oxynitride; SU 8

Indexed keywords

ASPECT RATIO; ETCHING; MASKS; METALLIZING; PHOTORESISTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYIMIDES; SILICON WAFERS;

FINE LINE METALLIZATION; HIGH ASPECT RATIO; PREIMIDIZED POLYIMIDE; SILICON OXYNITRIDE;

MICROMACHINING;

EID: 0001074665     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324322     Document Type: Conference Paper

References (10)

1. P. Grabbe, E.L. Hu, R.E. Howard, "Trilevel lift-off process for refractory metals," J. Vac. Sci. Technol., 21(1), May/June 1982, pp. 33-35.
2. A.A. Milgram, "Lift-off process for achieving fine-line metalization," J. Vac. Sci. Technol., B1(2), Apr/June 1983, pp. 490-493.
3. David S. Soane, Zoya Martynenko, "Polymers in Microelectronics: Foundamentals and Applications," Elsevier 1989, Amsterdam pp. 191-194.
4. Makoto Hirano, et al. "Three-Dimensional Passive Circuit Technology For Ultra-Compact MMIC's," IEEE MTT, Vol 43, No. 12. Dec. 1995, pp. 2845-2850.
5. Kiyomitsu Onodera, et al, "Folded U-Shaped Microwire Technology for Ultra-Compact Three-Dimensional MMIC's," IEEE MTT, Vol 44, No. 12, Dec. 1996, pp.2347-2353.
6. Kiyomitsu Onodera, et al, "Folded U-Shaped Microwire Technology for Ultra-Compact Three-Dimensional MMIC's," 1996 IEEE MTT-S Digest, pp. 1153-1156.
7. Y. Watanabe, M. Edo, H. Nakazawa, E. Yonezawa, "A new Fabrication Process of a Planar Coil Using Photosensitive Polyimide and Electroplating," Transducer'95, pp.268-271.
8. G. Engelmann, O. Ehrmann, J. Simon, H. Reichl, "Fabrication of High Depth-Width Aspect Ratio Microstructures," MEMS'92, pp. 93-98.
9. H. Lorenz, et al, "SU-8: a low-cost negative resist for MEMS," J. Micromech. Microeng. 7 (1997), pp. 121-124.
10. 2," J. Electrochem. Soc., Vol. 143, No. 4, April 1996, pp. 1464-1469.